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The plasmaflux atmospheric plasma can provide in-line treatment solution for FPD, film industry, and other researches that mostly combined with robot stage.
There are two types of power supplies can be adopted as a source of plasma generation.
First, 13.56MHz RF generator with Argon as a major carrier gas provides excellent glow discharge plasma and
40~50KHz LF generator with Nitrogen also make quite good plasma which is well known as Dielectric Barrier Discharge.
Additive gases like Hydrogen, Oxygen, and Air can be used with mixture of major carrier gases for process development.
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| Plasma flame with LF generator |
Plasma flame with RF generator |
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a. Major carrier gas
- Argon (with 13.56MHz RF generator)
- Nitrogen ( with 40KHz LF generator) |
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a. Bio science & Medical instruments
- Surface modification bio-degradable film
- Hydrophilic before dispensing bio active material |
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b. Plasma flame size (Length)
- Min. 100mm (Handy type, Portable )
- Max. 2000mm (Mounted on conveyor) |
b. Flat Panel Display
- Bare glass treatment before wet cleaning
- Treatment on transparent electrode |
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c. Plasma flame size ( Width)
- Min. 2mm
- Max. 15mm (RF), 20mm (LF) |
c. Research
- Making hydrophilic on selective area using mask
- Activation on plastics, Silicone (PDMS)
- Removal of organic layers |
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| d. Easy integration to in-line production |
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- N2 + Air, N2 + O2, N2 + H2 (~ 10%)
- Ar, Ar + O2, Ar + H2 (~10%), He |
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| Plasmaflux in Femto Science Lab |
Plasmaflux in Femto Science Lab |
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| Power generator |
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