|
 Model |
MAIUS -M |
| Laser & Optics |
Wavelength |
532nm |
|
Beam quality (M2) |
< 1.3 |
|
Spot size |
20 ~50um |
|
Cooling |
Air cooling |
|
Working speed |
8~10M dot/hr |
|
Scan field |
50mm x 50mm |
|
Optical power control |
|
| Work table |
Base |
Granite base & bridge |
|
Stage stroke |
400mm x 500mm |
|
Position accuracy |
กพ 1um |
|
Loading jig |
Horizontal tilt & vertical pitch |
|
Safety interlock |
|
| Software |
File format |
DXF and other pattern data |
|
Scatter marking & Overlap marking |
|
Pattern generation |
|
Laser control |
|
FPS control |
|
Stage control |
| Options |
Laser |
UV nano second laser |
|
|
Ultra short pulse laser up to 1 MHz pulse repetition |
|
Optics |
Auto focus module |
|
|
Auto power control module |
|
|
Auto spot sizing module |
|
Other |
Dual laser source integration |
|
|
