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 Model |
VITA-E (4E, 6E, 8E) |
| Generator |
Frequency |
13.56MHz |
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Output power |
300W, 600W, 1000W, 2000W |
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Matching |
Automatic |
| Chamber |
Material |
Aluminum |
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Sample loading |
4? 6? 8?/td>
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| Gas line |
No. of channel |
4 x Channels |
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Gas flow control |
By Mass Flow Controller |
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Material & Fitting |
Stainless steel, 1/4? VCR |
| Vacuum pump |
Depends on chamber volume |
| Pressure display |
By pirani gauge, Capacitance manometer |
| Control |
Semi-automatic and Manual |
| Utility |
380VAC, 50/60Hz, 3Ph, 5-wire |
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Heat exchange included |
| Dimension |
Depends on system configuration |
| Options |
Generator |
MW (2.45GHz) 600W, 1000W |
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Chamber |
Quartz chamber, Ceramic chamber |
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Gas line |
Up to 4 x additional gas channels with MFC |
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Vacuum pump |
Dry pump package |
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Turbo pumping package wit APC valve |
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Pressure display |
Ion gauge for turbo pumping |
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Control |
Fully automatic by PC control |
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Others |
Heating electrode |
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He backside cooling |
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Ceramic clamping chuck |
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End Point Detector |
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Nitrogen curtain |
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Spare parts set |
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