|
 Model |
COWIN-XXX |
| Generator |
Frequency |
40KHz |
|
Output power |
Up to 4000W (depends on chamber volume) |
|
Matching |
Automatic |
| Chamber |
Size |
Up to W700 x D600 x H600 (mm) |
|
Material |
Stainless steel (standard) |
| Gas line |
No. of channel |
3 x Channel |
|
Gas flow control |
By Mass Flow Controller |
|
Material & Fitting |
Stainless steel, 1/4? Lok-type |
| Vacuum pump |
Depends on chamber volume |
| Pressure display |
By pirani gauge, Capacitance manometer |
| Control |
Semi-automatic and Manual |
| Utility |
380VAC, 50/60Hz, 3Ph, 5-wire |
| Dimension |
Depends on system configuration |
| Options |
Generator |
RF (13.56MHz) up to 3000W |
|
Chamber |
Quartz chamber, Glass chamber |
|
Gas line |
Up to 5 x additional gas channels with MFC |
|
Vacuum pump |
Dry pump package |
|
|
Turbo pumping package wit APC valve |
|
Pressure display |
Ion gauge for turbo pumping |
|
Control |
Fully automatic by PC control |
|
Others |
Monomer bottle |
|
|
Multi tray electrode |
|
|
Temperature display |
|
|
Precise sample rotator |
|
|
Heat exchanger |
|
|
Spare parts set |
|
|
