|
 Model |
COGRADE |
| Generator |
Frequency |
40KHz |
|
Output power |
Max.300W |
|
Matching |
Automatic |
| Chamber |
Size |
Dia.210mm x L320mm |
|
Material |
Stainless steel (standard) |
| Gas line |
No. of channel |
2 x Channel |
|
Gas flow control |
By Mass Flow Controller |
|
Material & Fitting |
Stainless steel, 1/4? Lok-type |
| Vacuum pump |
Edwards E2M18 |
| Pressure display |
By pirani gauge |
| Control |
Semi-automatic and Manual |
| Utility |
220-240VAC, 50/60Hz, 1Ph |
| Dimension |
W600 x D640 x H810 (mm) |
| Options |
Generator |
RF (13.56MHz) 300W, 600W, 1000W |
|
|
LF (40KHz) 500W, 900W, 1200W |
|
Chamber |
Quartz chamber, Glass chamber |
|
|
Rectangular chamber (W240 x D350 x H160mm) |
|
Gas line |
Additional 1 x gas channel with MFC |
|
Control |
Fully automatic by PC control |
|
Others |
Monomer bottle |
|
|
Multi tray electrode |
|
|
Powder treatment |
|
|
Heating plate |
|
|
Temperature display |
|
|
Quartz boat |
|
|
Spare parts set |
|
|
