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 Model |
COVANCE |
| Generator |
Frequency |
40KHz |
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Output power |
Max.200W |
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Matching |
Automatic |
| Chamber |
Size |
Dia.150mm x L320mm |
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Material |
Stainless steel (standard) |
| Gas line |
No. of channel |
1 x Channel |
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Gas flow control |
By Mass Flow Controller |
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Material & Fitting |
Stainless steel, 1/4? Lok-type |
| Vacuum pump |
Edwards RV8 |
| Pressure display |
By pirani gauge |
| Control |
Semi-automatic and Manual |
| Utility |
220-240VAC, 50/60Hz, 1Ph |
| Dimension |
W550 x D420 x H430 (mm) |
| Options |
Generator |
RF (13.56MHz) up to 300W |
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Chamber |
Quartz chamber, Glass chamber |
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Rectangular chamber (W150 x D300 x H100mm) |
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Gas line |
Additional 1 x gas channel with MFC |
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Others |
Monomer bottle |
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Multi tray electrode |
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Powder treatment |
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Heating plate |
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Temperature display |
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Quartz boat |
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Spare parts set |
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