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CUTE, COVANCE, COGRADE Series cover the range from R&D to
small volume production for various plasma themes.
Together with the key features of easy to use, robustness, precise
and repeatable process control by options, the highly stable
and homogeneous glow discharge help users carry out their process
successfully.
COWIN is true mass production system with its chamber size up
to 700mm x 600mm x 600mm backed up by multi kw generator.
VITA series, vertical chambered plasma ashing and etching system,
adopt state?of-the-art
technology for the cutting edge devices
in Bio-chip and nano sensors |
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